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Vacuum Systems, Pumps
& Components |
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Vacuum System |
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CVC Mod CVE 301 EB-FR |
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E Beam Evap, 14" dia x 14"H SS bell jar, w/EB4M
E-gun power supply, CTI Cryo pump, Edwards roughing pump, Inficon
XTC programmer |
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CVC sputterer |
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4 stations, manual operation, MDX-10 DC Power Supply, 6"
diffusion pump |
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MAKE/MODEL
# |
PUMPING SPEED |
Alcatel/ADP81 |
47 CFM |
Alcatel/2030C |
17.7CFM/500 1/m |
Alcatel/ZT2063C |
50CFM/1420 1/m |
Edwards/E2M1 |
.7CFM/20.5 l/m |
Edwards/E2M8 |
6.7CFM/190 l/m |
Edwards/E2M40 |
30CFM/845 1/m |
Edwards/E2M80 |
57 CFM/1613 1/m |
Edwards/EH250 Fomblin |
190CFM/5367 1/m |
Leybold/D2 |
2.2CFM/62 l/m |
Leybold/D4 |
4.5CFM/127 l/m |
Leybold/D8 |
7.0CFM/198 l/m |
Leybold/D16 |
4.1CFM/400 l/m |
Leybold/D16BCS |
11.6CFM/328 1/m |
Leybold Heraeus/D30A |
26.8CFM/760 1/m |
Leybold Heraeus/D30AC |
26.8CFM/760 1/m |
Leybold/D60 |
36.7CFM/1039 l/m |
Leybold/S60 |
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Leybold/D65BC |
53CFM/1500 l/m |
Leybold/D90AC |
55CFM/1556 l/m |
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Pump/Blower Packages: |
MAKE/MODEL
# |
PUMPING SPEED |
Alcatel Mod. ADS 501
pump/blower package |
177 CFM |
Alcatel Mod. ADS 301
pump/blower package |
182 CFM |
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Alcatel "Guardian"
ADP pump controller |
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Edwards "Gameboy"
pump controllers
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Alcatel ADP pumps
Alcatel Mod. ADS 301 pump/blower package
182 CFM
Alcatel Mod. ADS 501 pump/blower package
177 CFM
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CVC sputtering system
4 station DC sputterer, MDX5 DC P/S
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Polycold PGC-150 chiller |
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Vacuum Parts/Equipment |
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Edwards Gate valve 4" SS #95-35556 1ea, Mod. # 96-37871 1ea, manual operation Brand New
Edwards Mod. #A52805000 QDP Gas Module, 1ea
Edwards Mod. #B653-01-000 manual gate valve, 4", SS, 1ea
Edwards Mod. GVI 100P 4" SS gate valve, pneumatic, 2ea Brand New
Inficon IC6000 deposition rate controller
Inficon Mod. Quadrex 100 mass spectrometer system, with Pfeiffer turbo pump,
MDC Mod. # KAV-150, manual right angle bellows seal valve, SS, w/KF-40 connections, 3ea
Leybold/Inficon Mass Spectrometer Controller, Quadrex 200 SCU
MKS Instruments 246 MFC Controller
MKS Mod. #252 Throttle Valve controller 4ea
MKS Type 250 Controller, 1ea
MKS type 250B Controllers, 3ea
MKS Type 252 A, Exhaust Valve Controller 1ea
Nor-Cal Products Mod. #11110-0403 manual gate valve, 4", SS, 1ea
Varian NRC 836 Vacuum Ionization Gauge Controller
Varian NRC 840 Vacuum Ionization Gauge Controller
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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