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Vacuum Systems, Pumps
& Components |
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CVC Mod CVE 301 EB-FR |
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E Beam Evap, 14" dia x 14"H SS bell jar, w/EB4M
E-gun power supply, CTI Cryo pump, Edwards roughing pump, Inficon
XTC programmer |
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CVC sputterer |
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4 stations, manual operation, MDX-10 DC Power Supply, 6"
diffusion pump |
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MAKE/MODEL
# |
PUMPING SPEED |
Alcatel/ADP81 |
47 CFM |
Alcatel/2030C |
17.7CFM/500 1/m |
Alcatel/2033C |
27CFM/765 1/m |
Alcatel/ZT2063C |
50CFM/1420 1/m |
Edwards/E2M8 |
6.7CFM/190 l/m |
Edwards/E2M40 |
30CFM/845 1/m |
Edwards/E2M80 |
57 CFM/1613 1/m |
Edwards/EH250 |
190CFM/5367 1/m |
Leybold D90AC |
55CFM/1556 l/m |
Leybold Heraeus/D30AC |
26.8CFM/760 1/m |
Leybold/D16 |
4.1CFM/400 l/m |
Leybold/D16BCS |
11.6CFM/328 1/m |
Leybold/D2 |
2.2CFM/62 l/m |
Leybold/D4 |
4.5CFM/127 l/m |
Leybold/D40BCS |
28.3CFM/ 920 1/m |
Leybold/D60 |
36.7CFM/1039 l/m |
Leybold/D65BC |
53CFM/1500 l/m |
Leybold/D8 |
7.0CFM/198 l/m |
Leybold/S60 |
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MAKE/MODEL
# |
PUMPING SPEED |
Alcatel Mod. ADS 301
pump/blower package |
182 CFM |
Alcatel Mod. ADS 501
pump/blower package |
177 CFM |
Edwards/EH250 blower/E2M40 |
220 CFM/6196 l/m |
Leybold Heraeus/WA250 LH D30AC Fomblin |
179 CFM/26.8 CFM |
Leybold Heraeus/WAU250 LH D40B |
169 CFM/28.3 CFM |
Leybold/D40BCS, w/blower |
28.3 CFM 920 1/m |
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Alcatel "Guardian"
ADP pump controller |
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Edwards "Gameboy"
pump controllers
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Alcatel ADP pumps
Alcatel Mod. ADS 301 pump/blower package
182 CFM
Alcatel Mod. ADS 501 pump/blower package
177 CFM
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CVC sputtering system
4 station DC sputterer, MDX5 DC P/S
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Polycold PGC-150 chiller |
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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