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| Quartzware for Branson/IPC Plasma Asher/Stripper system: |
P/N
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Description |
Q1033 |
Quartz T/C sheath, new, 1/8" dia x 15" long:
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Q2394 |
Quartz pumping shank manifold, new, 1"OD x 5"
long: |
Q2395 |
Quartz pumping shank, for low particulate chamber |
Q2248 |
Quartz gas ball fitting, new, w/1/4 or 3/8" tubing:
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Q3771 |
Quartz gas ball fitting, blank off/blind ball |
Q9872 |
Quartz gas ball fitting, new, w/1/4 or 3/8" tubing
x 5"long sheath going into chamber |
Q8743 |
Quartz chamber, used, 8" dia x 20" (D) |
Q8745 |
Quartz chamber, new, 10" dia x 20" (D) |
Q4653 |
Quartz chamber, used, 10" dia x 20" (D) |
Q8834 |
Quartz chamber, new, 12" dia x 20" (D), low
particulate or standard |
Q3376 |
Quartz window, new, 13.5" x 13.5" |
Q4527 |
Quartz window, new, 11.5" x 11.5" |
F9X19 |
9" dia x 19" long faraday cage, new/seasoned |
F9X19U |
9" dia x 19" long faraday cage, used |
F7X19 |
7" dia x 19" long faraday cage, new/seasoned
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F7X19 |
7" dia x 19" long faraday cage, new/unseasoned |
F7X19U |
7" dia x 19" long faraday cage (if available),
used |
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Hine 5-8" indexer
Brand New, 20 pcs available
MKS 252A controller, with
valve KF40 connections
MKS 253 throttle valve, with
KF 50 connections
The MKS 253 Exhaust Throttle Valve regulates the removal of
gas from a processing system. Its flapper is positioned to modulate
gas flow,
thereby controlling process pressure. The 253 has a patented
non-linear actuator placed between the flapper shaft and the
motor drive shaft in order
to generate a linear valve transfer characteristic and provide
smooth linear pressure control. The Type 253 is available in
standard sizes and flange
styles, and is compatible with all MKS throttle valve controllers
Branson etch tunnel
"equi-etch" tunnel for process uniformity, protection
against device radiation damage
Gasonics PEP control modules
Gas, Microwave, Misc, lamp controllers (many avail) |
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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