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| Quartzware for Branson/IPC Plasma Asher/Stripper system: |
P/N
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Description |
Q1033 |
Quartz T/C sheath, new, 1/8" dia x 15" long:
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Q2392 |
Quartz pumping shank manifold, new, 1"OD x 3" long |
Q2394 |
Quartz pumping shank manifold, new, 1"OD x 5"
long: |
Q2396 |
Quartz pumping shank manifold, elbow, for 8" chamber |
Q2395 |
Quartz pumping shank, for low particulate chamber |
Q2248 |
Quartz gas ball fitting, new, w/3/8" tubing |
Q2249 |
Quartz gas ball fitting, new, w/1/4" tubing |
Q3771 |
Quartz gas ball fitting, blank off/blind ball |
Q9871 |
Quartz vacuum xducer fitting, new, w/1/4 tubing x 5"long sheath going into chamber |
Q9872 |
Quartz vacuum xducer fitting, new, 3/8" tubing x 5"long sheath going into chamber |
Q9873 |
Quartz vacuum transducer fitting, new, 3/8' tubing, Tee connections for baratron head and vacuum test port, with 5" long sheath going into chamber |
Q873003 |
Quartz chamber, used, 8" dia x 13" (D) |
Q8744 |
Quartz chamber, new, 8" dia x 20" (D) |
Q8745 |
Quartz chamber, new, 10" dia x 20" (D) |
Q4653 |
Quartz chamber, used, 10" dia x 20" (D) |
Q8834 |
Quartz chamber, new, 12" dia x 20" (D), low
particulate or standard |
Q8834LP |
Quartz chamber, new, 12" dia x 20" (D), low particulate |
Q8835LP |
Quartz chamber, used, 12 x 20", low particulate |
Q8836 |
Quartz chamber, used, 12" dia x 20" (D) |
Q3376 |
Quartz window, new, 13.5" x 13.5" |
Q4527 |
Quartz window, new, 11.5" x 11.5" |
Q4527 |
Quartz window, used, 11.5" x 11.5" |
Q3103 |
Quartz window, new, 9.25 x 9.25" |
Q3003 |
Quartz window, used, 9.25" x 9.25" |
Q4055 |
Quartz window, used, for BIPC 4055 reactor, 3-7/8" |
T7X11 |
Quartz lattice trace, 7.5 x 11.5" |
21735-366 |
ball joint clamp 28/15 |
21735-399 |
ball joint clamp 35/25 |
F5X12 |
5" dia x 12" long faraday cage, used |
F9X19 |
9" dia x 19" long faraday cage, new/unseasoned |
F9X19N |
9" dia x 19" long faraday cage, new/seasoned |
F9X19U |
9" dia x 19" long faraday cage, used |
F7X19 |
7" dia x 19" long faraday cage, new/seasoned
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F7X19 |
7" dia x 19" long faraday cage, new/unseasoned |
F7X19U |
7" dia x 19" long faraday cage (if available),
used |
F7X19LFE |
7" dia x 15" long faraday cage, for LFE, used |
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Recommended spares for PM 112/122/132 RF Generator:
P/N |
Description |
| 97-2847 |
Replacement kit for IR T50AC60 Triac |
| C03392 |
HV Rectifier Board |
| B03399 |
+-12VDC Power Supply Board |
| 6514 |
Vacuum/Regulator Board |
| 03407-02 |
HV Regulator Board (with exchange) |
| 3448 |
Oscillator Board |
| 5600-0003 |
6JT6A oscillator tube |
| 3302-24 |
Fan, 220VAC |
| 98783 |
Tube, Eimac Y763/YU127/4CX1500B |
| 800SKB |
Tube Socket, Eimac, bypass Scr. Cap |
| 806SKB |
Chimney, tube |
| 5763 |
Tube, 5763, oscillator |
| 2391 |
Fuse, KAB-35, 6F387 |
| 9923 |
Relay, Time Delay, CHB38-70003 |
| 68893 |
Inductor, 100uH |
| 68894 |
Inductor, 10uH |
| 73654 |
Diode, 1N4151 |
| 02396 |
Fuse Kit, low current |
| 90873 |
Switch, EPO |
| MJ350 |
MJE 350, transistor |
| 2N5657 |
2N5657, transistor |
| X1356 |
Crystal, 13.56MHz, Xtron |
| 1500-XXXX |
HV Cap, ceramic disk, 25, 50, 100, 1000pF |
| C506 |
Capacitor, variable .8-10pF, osc tuning |
| 70066-01 |
Capacitor, Electrolytic, 480uF, 450VDC |
| 72999-01 |
Electrolytic Axial Cap 20uF 450VDC |
| 03339 |
T1, Y73-103, main transformer PM 112 |
| 5600-0016 |
T3 Xfmr, Filament 6.3VAC 112 |
Recommended spare parts for IPC 2000 Reactor Center:
P/N |
Description |
| 2884 |
Mother Board, 906U |
| 28865 |
Display Board, elapsed readout |
| 2288 |
Thumbwheel Board, 3 channel |
| 2908 |
Temperature control Bd. |
| 3900-0001 |
Neon Lamp, Amber 125V, Dialco |
| 3900-0002 |
Neon Lamp, Red 115V, Dialco |
| 5100-0002 |
Push Button Switch, C&K #P8121 |
| 5100-0012 |
DPDT Switch, C&K #7203 |
| 5100-0013 |
3PDT Switch, C&K #7301 |
| 2600-0004 |
Fan, 115VAC, Muffin |
| 2900-0370 |
Flowrater, 900cc/min, Labcrest |
| 4500-0009 |
Relay, P&B 120VAC #KRP-11A |
| 5930-0322 |
Tube, Vacuum Guage, #DV-4D |
| 5930-0022 |
Gas Valve, Allenair, 2 way, for process/purge gas |
| 5930-0034 |
Gas valve, Allenair, 3 way, for pump valve |
| 13549-01 |
Pump Valve Assy, rough line to 1" bellows |
| 3400-0003 |
Timer, 120V, Eagle-Signal |
| 5900-0120 |
10ea O-Rings, silicone P/N 2-120 |
| 5900-2116 |
10ea ORings, silicone P/N 2-116 |
| D04165 |
12x20 quartz chamber |
| B04448 |
28/15 Transducer, Ball Quartz |
| 8BJG |
Bell Jar Gasket, 8" silicone |
| 17618-01 |
Bell Jar Gasket, 10" dia, silicone |
| 17619-01 |
Bell Jar Gasket, 12" dia, silicone |
| 1500-0189 |
Capacitor, Ceramic tubular, 100pF, 5KV |
| 03690 |
Automatch Board, C02704C |
| 03662 |
Automatch Board, C12145 |
| 03534 |
Capacitor Motor M2, 975:1 (B04416) |
| 03471 |
Capacitor Motor M1 1734:1 (B03471) |
| C03470 |
Input Capacitor for 70X match |
| D04440 |
Output Capacitor for 70X match |
| 04458 |
Switch, mometary, capacitor limit, L1D2BE |
| 24F2884 |
Relay, P&B 120VAC, CHB38-70003
new
good used |
| 12696E |
automatch alignment kit, MFJ250 dummy load, rated 1.0KW for 10 min max, special coax cable |
02708
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Torrmeter 0-20T, analog, Modutec |
$420
02712 |
Wattmeter, 0-500W analog, Modutec |
$420
02714 |
Wattmeter, 0-1000W analog, Modutec |
$420
02715 |
Wattmeter, 0-1500W analog, Modutec |
$420
DL62-10-113-10 |
Lift and Turn Latch |
$52
02338 |
Sola DC P/S, SLT-12-31010-12 Power One HBAA-40W-A |
| TR1214 |
Temperature probe, 1/8" shielded |
DL62-10-113-10 |
Lift and Turn Latch |
Recommended spare parts for IPC 3000/4000 Reactor Center:
P/N |
Description |
| 3900-0001 |
Neon Lamp, Amber 125V, Dialco |
| 3900-0002 |
Neon Lamp, Red 115V, Dialco |
| 5100-0002 |
Push Button Switch, C&K #P8121 |
| 5100-0012 |
DPDT Switch, C&K #7203 |
| 5100-0013 |
3PDT Switch, C&K #7301 |
| 2600-0004 |
Fan, 115VAC, Muffin |
| 2900-0370 |
Flowrater, 900cc/min, Labcrest |
| 4500-0009 |
Relay, P&B 120VAC #KRP-11A |
| 5930-0322 |
Tube, Vacuum Guage, Hastings #DV-4D |
| 5930-0022 |
Gas Valve, ASCO |
| 3400-0003 |
Timer, 120V, Eagle-Signal |
| 5900-0120 |
10ea O-Rings, silicone P/N 2-120 |
| 5900-2116 |
10ea ORings, silicone P/N 2-116 |
| Q8834 |
Quartz chamber, new, 12" dia x 20" (D), standard: |
| 8BJG |
Bell Jar Gasket, 8" silicone |
| 17618-03 |
Oring Seal, silicone, for BIPC 4055 door |
| 17618-01 |
Bell Jar Gasket, 10" dia, silicone |
| 17619-01 |
Bell Jar Gasket, 12" dia, silicone |
| 17618-004 |
Bell Jar Gasket, 10" dia, viton |
| 17618-005 |
Bell Jar Gasket, 12" dia, viton |
| 1500-0189 |
Capacitor, Ceramic tubular, 100pF, 5KV |
| 03690 |
Automatch Board, C02704C |
| 03534 |
Capacitor Motor M2, 975:1 (B04416) |
| 03471 |
Capacitor Motor M1 1734:1 (B03471) |
| C03470 |
Input Capacitor for 70X match |
| D04440 |
Output Capacitor for 70X match |
| 04458 |
Switch, mometary, capacitor limit, L1D2BE |
| 24F2884 |
Relay, P&B 120VAC, CHB38-70003
new
good used |
| 12696E |
automatch alignment kit, MFJ250 dummy load, rated 1.0KW for 10 min max, special coax cable |
| 02708 |
Torrmeter 0-20T, analog, Modutec |
| 02712 |
Wattmeter, 0-500W analog, Modutec |
| 02714 |
Wattmeter, 0-1000W analog, Modutec |
| 02715 |
Wattmeter, 0-1500W analog, Modutec |
| DL62-10-113-10 |
Lift and Turn Latch |
| 02338 |
Sola DC P/S, SLT-12-31010-12
Power One HBAA-40W-A |
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Hine 5-8" indexer
Brand New, 20 pcs available
MKS 252A controller, with
valve KF40 connections
MKS 253 throttle valve, with
KF 50 connections
The MKS 253 Exhaust Throttle Valve regulates the removal of
gas from a processing system. Its flapper is positioned to modulate
gas flow,
thereby controlling process pressure. The 253 has a patented
non-linear actuator placed between the flapper shaft and the
motor drive shaft in order
to generate a linear valve transfer characteristic and provide
smooth linear pressure control. The Type 253 is available in
standard sizes and flange
styles, and is compatible with all MKS throttle valve controllers
Branson etch tunnel
"equi-etch" tunnel for process uniformity, protection
against device radiation damage
Gasonics PEP control modules
Gas, Microwave, Misc, lamp controllers (many avail)
Gasonics Aura 3000 Process
Gasonics Aura 3000 Plasma Processing chamber, with:
- Plasma source
- Microwave Power Supply
- associated cables
Microwave Source, for Gasonics/Novellus Aura AE2001
Microwave Downstream Plasma Source Assembly,
for Gasonics/Novellus tools, with:
Gasonics A3000 A3010 PEP Lamp Tray
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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