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Accurate Gas Control chiller, Mod. AG-T, -15 to 85 Deg C,
2136W
Air Products auto purge gas cabinet
Anger electronic Mod. TSN 180 dry film laminator, for thick
resist coatings up to 30-40 microns
Aquafine Water Sterilizer, portable unit
ASGT single cylinder gas cabinet (for small cylinders)
B&L Mod. TS-2 Stereo Dynascope, teaching microscope
B&L Stereo Zoom 7 microscope pod, 10X eyepieces,
B&L Stereo Zoom microscope, on boom stand
Blue M Oven OV8A Mini Oven
Dage
Mod. BT23 Shear Tester, for ball bonds, and tab bumps. 200
gram,
Euro Therm, Model # 8412-690 Temp. controller, 1ea
Eurotherm Mod. #984/4 temp controller
FSI
Polaris 1000 Microlithography Cluster tool, set up for 6",
1 Coat Module, 1 Develope Module, 1 Vapor Prime/Chill module,
1 Programmable proximity precision back/chill module (4 back/1
chill each), 1 150mm I/O module, 1 Staubi 560C robot, 1 Ultratech
2700 Stepper Interface, 1 RAM 3000 cluster environmental control
system, 1 Electrical Power Distribution system, 1 remote cluster
controller, 1 corner dispense module with 3 cybor pumps w/integral
millipore 16 stack filters, 1 corner dispense module with 3
cybor pumps w/o intergral filters, 1 Optical Specialties Inc.
optical inspection station interface
High Yield Technology, HYT Model controller, 1ea
High Yield Technology, Model #150 Programmable Controller 1ea
Innovative Engineering Mod. 815 burn box
J.C. Schumaker 100 and STC115 Source Temperature Controller
Power Supplies with pots
LDM Plasma Controller 1ea
Mech-El Mod. 990 Thermal Compression Bonder
Micromanipulator 6000 Stage
Micromanipulator Mod. C0222 manual prober, for 2"
Neslab Mod. HX-150 water chiller, w/DI filter, for AME 5000
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective
Olympus Stereo Zoom scope, on boom stand
Praxair auto purge gas cabinet
Rucker
& Kolls Mod. 430 manual probe station, for 2"
Semifab CD-100 Environmental Control Systems, used with wafer
track systems
Signatone Mod. S1007 Semi auto/manual probe station, for 4"
Verteq Spin Rinse Dryers, Models, 1600-34, and 1600-55A, $12,500/ea
Westbond Mod. 7440C wire bonder, for insulated wire, manual
Zeiss metallurgical microscope, binoc head w/10X eyepieces,
4X, 8X, 16X objectivesw/misc. wafer/mask fixtures
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Zeiss SM Lux
m'scope
Leitz SM Lux with transmitted and reflected light
base, BF/DF vertical illuminator, 20W lamp housing,
binocular tube, 6x6 stage,16x, 20x, 100x objectives, condenser
and 10x eyepieces |
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Lasair 510
particle detection system
For accurate measurement of clean room particles |
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Olympus BH2
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective
$1700 |
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Semifab CD100
environmental control system
Used with wafer track/litho systems |
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Verteq 1600 SRD
VERTEQ 1600-34 double stack SRDs, Resistivity limit, Auto
Wash
Number of Units 3
Substrate Size 6"
Wafer Size 150 mm
Wafer Size Range
Set Size 150 mm
Heated Nitrogen YES
Rotors Included YES
Controller Type Analog Controller Type
Controller Model Verteq
Resistivity Monitor YES
Built-In Resistivity Monitor Included
Rinse Speeds 300 RPM
Dry Speeds 300 RPM
Timer Duration 180 sec
Cart Mounted YES
SRD Configuration Double Stack
Fl Delivery Channels
Number of Channels 2
DI Water YES
2 systems are complete, 1 system is partially cannibalized
Power Requirements 120 V 15.0 A 60 Hz
Condition Very Good |
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VERTEQ 1600-55M
Number of Units 1
Manufacturer Verteq
Model 1600-55M
Substrate Size 6
Wafer Size 150 mm
Controller Type Microprocessor Controller Type
Controller Model 1075227
Resistivity Monitor YES
Cart Mounted YES
SRD Configuration Double Stack
Accessories DTS-560M Resist Monitor.
Power Requirements 120 V 50/60 Hz 1 Phase
Condition Very Good
Exterior Dimensions
Width in cm
Depth in cm
Height in cm |
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Dage 23 shear tester
w/200 gram head with IEEE computer interface |
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Westbond bonder
Westbond Mod. 7440C wire bonder, S/N 14617, for insulated
wire, manual, Olympus S/Z microscope $5500 |
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AME heat exhanger
Heat Exchanger used on AMAT 8310 oxide etcher
Dims 52cm x 73cm x 18cm
Version: Facilities
Model: 0010-00557 |
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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