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Accurate Gas Control chiller, Mod. AG-T, -15 to 85 Deg C,
2136W
Air Products auto purge gas cabinet
Anger electronic Mod. TSN 180 dry film laminator, for thick
resist coatings up to 30-40 microns
Aquafine Water Sterilizer, portable unit
ASGT single cylinder gas cabinet (for small cylinders)
B&L Mod. TS-2 Stereo Dynascope, teaching microscope
B&L Stereo Zoom 7 microscope pod, 10X eyepieces,
B&L Stereo Zoom microscope, on boom stand
Blue M Oven OV8A Mini Oven
Dage
Mod. BT23 Shear Tester, for ball bonds, and tab bumps. 200
gram,
Euro Therm, Model # 8412-690 Temp. controller, 1ea
Eurotherm Mod. #984/4 temp controller
FSI
Polaris 1000 Microlithography Cluster tool, set up for 6",
1 Coat Module, 1 Develope Module, 1 Vapor Prime/Chill module,
1 Programmable proximity precision back/chill module (4 back/1
chill each), 1 150mm I/O module, 1 Staubi 560C robot, 1 Ultratech
2700 Stepper Interface, 1 RAM 3000 cluster environmental control
system, 1 Electrical Power Distribution system, 1 remote cluster
controller, 1 corner dispense module with 3 cybor pumps w/integral
millipore 16 stack filters, 1 corner dispense module with 3
cybor pumps w/o intergral filters, 1 Optical Specialties Inc.
optical inspection station interface
High Yield Technology, HYT Model controller, 1ea
High Yield Technology, Model #150 Programmable Controller 1ea
Innovative Engineering Mod. 815 burn box
Intellitech Stainless Steel parts cleaning sink
J.C. Schumaker 100 and STC115 Source Temperature Controller
Power Supplies with pots
LDM Plasma Controller 1ea
Mech-El Mod. 990 Thermal Compression Bonder
Micromanipulator 6000 Stage
Micromanipulator Mod. C0222 manual prober, for 2"
Neslab Mod. HX-150 water chiller, w/DI filter, for AME 5000
OAI Mod. 2000 Edge bead exposure system, 486 comp control, robot
loader,
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective
Olympus Stereo Zoom scope, on boom stand
Praxair auto purge gas cabinet
Rucker
& Kolls Mod. 430 manual probe station, for 2"
Semifab CD-100 Environmental Control Systems, used with wafer
track systems
Signatone Mod. S1007 Semi auto/manual probe station, for 4"
SSEC Mod. 156-SC Plate cleaner,
complete
Verteq Spin Rinse Dryers, Models, 1600-34, and 1600-55A, $12,500/ea
Westbond Mod. 7440C wire bonder, for insulated wire, manual
Zeiss metallurgical microscope, binoc head w/10X eyepieces,
4X, 8X, 16X objectivesw/misc. wafer/mask fixtures
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Nicolet ECO 2000 FT-IR Metrology Tool
* 1999 Vintage
* With Asyst 2200 SMIF loader, or manual loading of 100 mm
to 200 mm
wafers
* The NicoletTM ECOTM 2000 measures dopant concentration levels
in
dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in
silicon nitride films, epitaxial film thickness, MEMS device
thickness, and substitutional carbon and interstitial oxygen
levels in silicon wafers.
Some of the highlights of the ECO 2000 include:
* Completely automated wafer handling
* Automated wafer centering and alignment using flats or notches
* High throughput
* Exceptionally stable and reproducible measurement results
* Wafer contact using Teflon-coated vacuum holds on the backside
only
* Capable of measuring epitaxial film thickness from 300 nm
to 7,500 nm
* Powerful FT-IR software toolkit for custom recipe generation
* SECS/GEM communications software
* Compliant with SEMI S2 and S8 safety and ergonomic standards
* Flexible measurement options from single point measurements
to complete wafer mapping options
* Transmission and reflectance measurement capability to accommodate
the widest range of materials and films
* Support of both ASTM and JEIDA standards
* Class 2 cleanroom ready
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Zeiss SM Lux
m'scope
Leitz SM Lux with transmitted and reflected light
base, BF/DF vertical illuminator, 20W lamp housing,
binocular tube, 6x6 stage,16x, 20x, 100x objectives, condenser
and 10x eyepieces |
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SSEC 156SC
plate cleaner, S/N 1653 with:
Plate Chuck 5 x 5"
2ea Alloy Products Chemical tanks
Facilities Req: 65-100 PSI Air, .08GPM Water, 120VAC, 50/60Hz,
1Ph, 7A
System computer
Manual load
System appears to be complete, except cleaning brush
System as-is/no warranty
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Lasair 510
particle detection system
For accurate measurement of clean room particles |
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Olympus BH2
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective
$1700 |
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Semifab CD100
environmental control system
Used with wafer track/litho systems |
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Verteq 1600 SRD
VERTEQ 1600-34 double stack SRDs, Resistivity limit, Auto
Wash
Number of Units 3
Substrate Size 6"
Wafer Size 150 mm
Wafer Size Range
Set Size 150 mm
Heated Nitrogen YES
Rotors Included YES
Controller Type Analog Controller Type
Controller Model Verteq
Resistivity Monitor YES
Built-In Resistivity Monitor Included
Rinse Speeds 300 RPM
Dry Speeds 300 RPM
Timer Duration 180 sec
Cart Mounted YES
SRD Configuration Double Stack
Fl Delivery Channels
Number of Channels 2
DI Water YES
2 systems are complete, 1 system is partially cannibalized
Power Requirements 120 V 15.0 A 60 Hz
Condition Very Good |
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VERTEQ 1600-55M
Number of Units 1
Manufacturer Verteq
Model 1600-55M
Substrate Size 6
Wafer Size 150 mm
Controller Type Microprocessor Controller Type
Controller Model 1075227
Resistivity Monitor YES
Cart Mounted YES
SRD Configuration Double Stack
Accessories DTS-560M Resist Monitor.
Power Requirements 120 V 50/60 Hz 1 Phase
Condition Very Good
Exterior Dimensions
Width in cm
Depth in cm
Height in cm |
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Dage 23 shear tester
w/200 gram head with IEEE computer interface |
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Westbond bonder
Westbond Mod. 7440C wire bonder, S/N 14617, for insulated
wire, manual, Olympus S/Z microscope $5500 |
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AME heat exhanger
Heat Exchanger used on AMAT 8310 oxide etcher
Dims 52cm x 73cm x 18cm
Version: Facilities
Model: 0010-00557 |
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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