Seminconductor Equipment

 
 
 
  Accurate Gas Control chiller, Mod. AG-T, -15 to 85 Deg C, 2136W
Air Products auto purge gas cabinet
Anger electronic Mod. TSN 180 dry film laminator, for thick resist coatings up to 30-40 microns
Aquafine Water Sterilizer, portable unit
ASGT single cylinder gas cabinet (for small cylinders)
B&L Mod. TS-2 Stereo Dynascope, teaching microscope
B&L Stereo Zoom 7 microscope pod, 10X eyepieces,
B&L Stereo Zoom microscope, on boom stand
Blue M Oven OV8A Mini Oven
Dage Mod. BT23 Shear Tester, for ball bonds, and tab bumps. 200 gram,
Euro Therm, Model # 8412-690 Temp. controller, 1ea
Eurotherm Mod. #984/4 temp controller
FSI Polaris 1000 Microlithography Cluster tool, set up for 6", 1 Coat Module, 1 Develope Module, 1 Vapor Prime/Chill module, 1 Programmable proximity precision back/chill module (4 back/1 chill each), 1 150mm I/O module, 1 Staubi 560C robot, 1 Ultratech 2700 Stepper Interface, 1 RAM 3000 cluster environmental control system, 1 Electrical Power Distribution system, 1 remote cluster controller, 1 corner dispense module with 3 cybor pumps w/integral millipore 16 stack filters, 1 corner dispense module with 3 cybor pumps w/o intergral filters, 1 Optical Specialties Inc. optical inspection station interface
High Yield Technology, HYT Model controller, 1ea
High Yield Technology, Model #150 Programmable Controller 1ea
Innovative Engineering Mod. 815 burn box
J.C. Schumaker 100 and STC115 Source Temperature Controller Power Supplies with pots
LDM Plasma Controller 1ea
Mech-El Mod. 990 Thermal Compression Bonder
Micromanipulator 6000 Stage
Micromanipulator Mod. C0222 manual prober, for 2"
Neslab Mod. HX-150 water chiller, w/DI filter, for AME 5000
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective
Olympus Stereo Zoom scope, on boom stand
Praxair auto purge gas cabinet
Rucker & Kolls Mod. 430 manual probe station, for 2"
Semifab CD-100 Environmental Control Systems, used with wafer track systems
Signatone Mod. S1007 Semi auto/manual probe station, for 4"
Verteq Spin Rinse Dryers, Models, 1600-34, and 1600-55A, $12,500/ea
Westbond Mod. 7440C wire bonder, for insulated wire, manual
Zeiss metallurgical microscope, binoc head w/10X eyepieces, 4X, 8X, 16X objectivesw/misc. wafer/mask fixtures
 
   
 





 
  Zeiss SM Lux m'scope
Leitz SM Lux with transmitted and reflected light base, BF/DF vertical illuminator, 20W lamp housing,
binocular tube, 6x6 stage,16x, 20x, 100x objectives, condenser and 10x eyepieces
 
 

Lasair 510 particle detection system
For accurate measurement of clean room particles

 
     
 

Olympus BH2
Olympus BH-2 microscope, binoc head w/10X eyepieces, 40X objective $1700

 
 

Semifab CD100 environmental control system
Used with wafer track/litho systems

 
 

Verteq 1600 SRD
VERTEQ 1600-34 double stack SRDs, Resistivity limit, Auto Wash
Number of Units 3
Substrate Size 6"
Wafer Size 150 mm
Wafer Size Range
Set Size 150 mm
Heated Nitrogen YES
Rotors Included YES
Controller Type Analog Controller Type
Controller Model Verteq
Resistivity Monitor YES
Built-In Resistivity Monitor Included
Rinse Speeds 300 RPM
Dry Speeds 300 RPM
Timer Duration 180 sec
Cart Mounted YES
SRD Configuration Double Stack
Fl Delivery Channels
Number of Channels 2
DI Water YES
2 systems are complete, 1 system is partially cannibalized
Power Requirements 120 V 15.0 A 60 Hz
Condition Very Good

 
 

 

 
 

VERTEQ 1600-55M
Number of Units 1
Manufacturer Verteq
Model 1600-55M
Substrate Size 6
Wafer Size 150 mm
Controller Type Microprocessor Controller Type
Controller Model 1075227
Resistivity Monitor YES
Cart Mounted YES
SRD Configuration Double Stack
Accessories DTS-560M Resist Monitor.
Power Requirements 120 V 50/60 Hz 1 Phase
Condition Very Good
Exterior Dimensions
Width in cm
Depth in cm
Height in cm

 
 

Dage 23 shear tester
w/200 gram head with IEEE computer interface

 
 

Westbond bonder
Westbond Mod. 7440C wire bonder, S/N 14617, for insulated wire, manual, Olympus S/Z microscope $5500

 
 

AME heat exhanger
Heat Exchanger used on AMAT 8310 oxide etcher
Dims 52cm x 73cm x 18cm
Version: Facilities
Model: 0010-00557

 
 

Product Lines

 
 


Plasma Systems

RF Power supplies
matching networks


Vacuum Systems,
Pumps & Components


Semiconductor Equipment

Spare Parts

Test & Facilities Equipments

 
 

Our Address

 
 


Plasmatek Labs
,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922

 
 

Plasma Lines

 
 

Dage Mod. BT23 Shear Tester

FSI Polaris 1000 Microlithography Cluster tool

Rucker & Kolls Mod. 430

SSEC Mod. 156-SC Plate cleaner, complete

Zeiss SM Lux

Lasair 510

Olympus BH2

Semifab CD100

Verteq 1600 SRD

VERTEQ 1600-55M

Dage 23 shear tester

Westbond bonder

AME heat exhanger