| |
MAKE/MODEL |
POWER |
FREQUENCY |
| AE MDX-10 |
10KW |
DC |
| AE MDX-10 slave |
10KW |
DC |
| AE PE-1000Z |
1000 W |
55 Khz |
| AGL 94-2618 |
1250W |
2.45GHz |
| AGL C12932-2 |
1250W |
2.45 GHz |
| AGL C13170 |
1250W |
2.45 GHz |
| Airco SP-5 |
5000W |
sput PS |
| Astex D13765 |
1800W |
2.45 GHz |
| Branson/IPC PM 119-129 |
500W |
13.56MHz |
| Branson PM 112-122-132 |
1000W |
13.56MHz |
| Comdel CPS-1001 |
1000W |
13.56MHz |
| ENI ACG-5XL |
500W |
13.56MHz |
| ENI LPG-12A |
1200 W |
90-460 Khz |
| ENI AGC-10T |
1000W |
13.56MHz |
| ENI OEM-6and 6AXL |
600W |
13.56MHz |
| ENI HF-1T |
1000W |
13.56MHz |
| ENI OEM12A |
1250W |
13.56MHz |
| ENI OEM12B |
1250W |
13.56MHz |
| ENI OEM25 and 25XL |
2500W |
13.56MHz |
| ENI Plasmaloc 2 HF |
2000W |
100-450KHz |
| ENI PL3HF |
3000W |
25-125KHz |
| ENI OEM28B |
2800W |
13.56MHz |
| ENI OEM 50 |
5000W |
13.56MHz |
| ENI Matchworks 25D |
3000W max |
13.56MHz |
| Huettinger IS6/13560 |
6000W |
13.56MHz |
| LFE/SA 40 C |
500W |
13.56MHz |
| RF Plasma Prod. HFS5000 |
5000W |
13.56MHz |
| RF Svcs 9900 match with
controller |
10KW |
13.56MHz |
| Tegal |
300W |
13.56MHz |
 |
|
| |
Advanced Energy PE5000 RF Generator
40 kHz, maximum power 5 kW, maximum voltage 600 V |
|
| |
AME P5000 automatch |
|
| |
AGL C13170 microwave generator
1250W @ 2.45GHz
Peak V 4300
190/240VAC, single phase, 20A, 50/60Hz input power req. |
|
| |
Branson PM 112 generator
Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA |
|
| |
ENI ACG 5XL generator
ENI ACG-5XL, 500W @ 13.56MHz |
|
| |
ENI OEM 50 generator
1ea ENI Mod. OEM 50N-11601 RF Generator,
S/N 6256
50 Ohm output impedance
Type LC output connector
Amphenol Type D, 15 pin connector
Input 190-240, 330-415VAC/3PhY/50/60 Hz/30/15A
Output 5000W 13.56MHz
Weight 375 lbs
Dims 17 x 21 x 27"H
water cooled
set up for Novellus equipment |
|
| |
ENI OEM 12A generator
1ea ENI Mod. OEM 12AB RF Generator
used in Branson/IPC Mod. PM 332 RF Generator, P/N 13650-01
1000W @ 13.56MHz
220VAC/50/60Hz/1Ph/20A |
|
| |
ENI OEM 12B generator
1ea ENI Mod. OEM 12B, 1250W, 13.56 MHz, 200-240VAC, 50/60Hz,
3Ph, 20A, set up w/25 pin IO connector
(easily converted to 15 pin IO connection)
System rebuilt/tested operational w/30 day warranty |
|
| |
ENI Mod. OEM-25A or 25A XL
RF Generator:
2500W @ 13.56MHz
190-240VAC/3Ph/20A
Type HN output connector
Water cooled
Rebuilt/Tested/Operational |
|
| |
Comdel CPM 1000
1000W @ 13.56MHz, auto/manual operation |
|
| |
ENI match controller
Part No. MW-50-21181-50
Serial Number 148C, Rev B, (5/92) |
|
| |
RF Services 10KW match,
with controller
RF Svcs 9900 match 10KW@13.56MHz $5500 2ea available |
|
| |
AE MDX 5 DC P/S
5000W DC $2500 |
|
| |
AE LDM RF Generator
PEP 2500A Plasma Source |
|
| |
RFPP RF50 5KW generator
The RFPP power supply consist of a series of modules in an
aluminum chassis. Diagnostics can be read through the front
panel or through the RS-232/422/485
interface. Repair is accomplished by replacing the faulty
modules. RF power is developed by an amplifier of MOSFET design
mounted on an air-cooled heat
sink, water cooled for the larger supplies. The 50S with passive
front panel is air cooled. |
|
| |
RFPP RF5S generator
1ea RF Power Products Mod. RF 5S RF Generator
Serial Number S-916
Unit Price $2600.00
Number 1ea
Manufacturer RF Power Products
Model RF5S
Description RF Power Supply
Rated Power Output 500 Watts
Maximum 13.56
Scale MHz
Output Impedance 50 Ohms
Repeatability ± 0.50 %
Reflected Power Limit 37.00 W
Output Connector Type N
Interface Other
Panel Meters Digital
External Cooling Air Cooled
Other Information Rating: 500 W @ 13.56 MHz
Various interface connectors
Power Requirements 120/240 V 20.0 A 10.0 A 50/60 Hz 1 Phase
Condition Like New, tested fully operational |
|
| |
RFPP AMN2001E match network
2000W @ 13.56MHz (remote or local control) (uses AMN-PS2 controller) |
|
| |
|
|
