AME P5000 automatch
Aixcon Microwave Downstream Plasma Source Assembly, with:

Aixcon Mod. Y2000 magnetron Ass'y, GSNX PN 1700-2041, manufactured 7/2000, (we believe this is for Gasonics)
GAE (Gerling Applied Engineering) Launch Sector, Mod. # 910302
GAE Dual Coupler/E-Bend, Mod. 910303
Three port circulator (Mfr. unknown) Mod. #284C1RC3A
GAE Dummy Load Coupler, Mod. # 910406
Dims: 12X14X17"H
No cables or manuals are included

AGL C13170 microwave generator
1250W @ 2.45GHz
Peak V 4300
190/240VAC, single phase, 20A, 50/60Hz input power req.

Astex Mod. AX7610-4 Chemical Downstream Plasma Source

Rev 1J, S/N 142
Used on Gasonics/Novellus PEP Iridia systems
UV lamp attached
tube installed (unsure if the tube is quartz, or sapphire)
Good condition, but we are unable to test this unit
Unit sold "as-is, where-is"
OEM data at: http://www.mksinst.com/docs/UR/ASTEXax7610DS.pdf
The AX7610 is a microwave plasma source for downstream chemical etch applications, such as photoresist stripping and hard mask removal. With replaceable quartz or sapphire tubes, the AX7610 downstream source offers flexibility of configuration to meet the most demanding application process parameters. The quartz tube version is ideally suited for production of atomic oxygen for resist stripping. The sapphire tube version is compatible with much more severe CF4 and NF3 chemistries for isotopic etch and other applications.

Branson PM 112 generator
Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA

ENI ACG 5XL generator
ENI ACG-5XL, 500W @ 13.56MHz

ENI OEM 50 generator
1ea ENI Mod. OEM 50N-11601 RF Generator,
S/N 6256
50 Ohm output impedance
Type LC output connector
Amphenol Type D, 15 pin connector
Input 190-240, 330-415VAC/3PhY/50/60 Hz/30/15A
Output 5000W 13.56MHz
Weight 375 lbs
Dims 17 x 21 x 27"H
water cooled
set up for Novellus equipment

ENI OEM 12A generator
1ea ENI Mod. OEM 12AB RF Generator
used in Branson/IPC Mod. PM 332 RF Generator, P/N 13650-01
1000W @ 13.56MHz
220VAC/50/60Hz/1Ph/20A

ENI OEM 12B generator
1ea ENI Mod. OEM 12B, 1250W, 13.56 MHz, 200-240VAC, 50/60Hz, 3Ph, 20A, set up w/25 pin IO connector
(easily converted to 15 pin IO connection)
System rebuilt/tested operational w/30 day warranty

ENI Mod. OEM-25A or 25A XL RF Generator:
2500W @ 13.56MHz
190-240VAC/3Ph/20A
Type HN output connector
Water cooled
Rebuilt/Tested/Operational

Comdel CPM 1000
1000W @ 13.56MHz, auto/manual operation

ENI match controller
Part No. MW-50-21181-50
Serial Number 148C, Rev B, (5/92)

RF Services 10KW match, with controller
RF Svcs 9900 match 10KW@13.56MHz $5500 2ea available

AE MDX 5 DC P/S
5000W DC $2500

AE LDM RF Generator
PEP 2500A Plasma Source

RFPP RF50 5KW generator
The RFPP power supply consist of a series of modules in an aluminum chassis. Diagnostics can be read through the front panel or through the RS-232/422/485
interface. Repair is accomplished by replacing the faulty modules. RF power is developed by an amplifier of MOSFET design mounted on an air-cooled heat
sink, water cooled for the larger supplies. The 50S with passive front panel is air cooled.

RFPP RF5S generator
1ea RF Power Products Mod. RF 5S RF Generator
Serial Number S-916
Unit Price $2600.00
Number 1ea
Manufacturer RF Power Products
Model RF5S
Description RF Power Supply
Rated Power Output 500 Watts
Maximum 13.56
Scale MHz
Output Impedance 50 Ohms
Repeatability ± 0.50 %
Reflected Power Limit 37.00 W
Output Connector Type N
Interface Other
Panel Meters Digital
External Cooling Air Cooled
Other Information Rating: 500 W @ 13.56 MHz
Various interface connectors
Power Requirements 120/240 V 20.0 A 10.0 A 50/60 Hz 1 Phase
Condition Like New, tested fully operational

RFPP AMN2001E match network
2000W @ 13.56MHz (remote or local control) (uses AMN-PS2 controller)

Plasma Systems

RF Power supplies
matching networks

Vacuum Systems,
Pumps & Components

Semiconductor Equipment

Spare Parts

Test & Facilities Equipments

Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922