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RF Power Supplies
Matching Networks |
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MAKE/MODEL |
POWER |
FREQUENCY |
| AE LDM Plasma |
5KW |
40KHz |
| AE MDX-10 |
10KW |
DC |
| AE MDX-10 slave |
10KW |
DC |
| AE PE-1000Z |
1250 W |
25-100 Khz |
| AE PDW2200 |
2200 W |
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| AE RFPP50 |
5000W |
13.56 MHz |
| AGL D13765 |
1800W |
2.45 GHz |
| AGL 94-2618 |
1250W |
2.45GHz |
| AGL C12932-2 |
1250W |
2.45 GHz |
| Astex OEM- C13170 |
1250W |
2.45 GHz |
| AGL C13170 (Ash) |
1250W |
2.45 GHz |
| Branson PM 119 |
500W |
13.56MHz |
| Branson PM 118 |
500W |
13.56MHz |
| Branson PM 112 |
1500W |
13.56MHz |
| Branson PM 122 |
1500W |
13.56MHz |
| Branson PM 129 |
500W |
13.56MHz |
| Branson PM 332 |
1000W |
13.56MHz |
| ENI HF1 |
2000W |
13.56MHz |
| ENI ACG-5XL |
500W |
13.56MHz |
| ENI AGC-10T |
1000W |
13.56MHz |
| ENI OEM-6 |
600 W |
13.56Mhz |
| ENI OEM-6 XL |
600 W |
13.56Mhz |
| ENI HF-1T |
1000W |
13.56MHz |
| ENI OEM12A |
1250W |
13.56MHz |
| ENI OEM12B |
1250W |
13.56MHz |
| ENI OEM25 and 25XL |
2500W |
13.56MHz |
| ENI Plasmaloc 2 HF |
2000W |
100-450KHz |
| ENI PL3HF |
3000W |
25-125KHz |
| ENI OEM28B |
2800W |
13.56MHz |
| ENI OEM 50 |
5000W |
13.56MHz |
| Gerling Labs 94-2618 |
1250W |
2.45GHz |
| LFE/SA 40 C |
500W |
13.56MHz |
| RF Plasma Prod. |
500W |
13.56MHz |
| RFPP50 |
5000W |
13.56MHz |
| Tegal |
300W |
13.56MHz |
| SEREN L300 |
300W |
350-460 KHz |
| SEREN R300 |
300W |
13.56MHz |
| SEREN R1000 |
1000W |
13.56MHz |


Matching Networks
AME (Trazar) 8100N 13.56MHz
AME (Trazar) 0016-09750
Plasma Therm AMNS 2000 2000W 13.56MHz
RFPP MN-1000E 1000W 13.56MHz
RFPP AM10 1KW 13.56MHz
SEREN PM313, 300W, 13.56MHz
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AME P5000 automatch
Aixcon Microwave Downstream Plasma
Source Assembly, with:
Aixcon Mod. Y2000 magnetron Ass'y, GSNX PN 1700-2041, manufactured
7/2000, (we believe this is for Gasonics)
GAE (Gerling Applied Engineering) Launch Sector, Mod. # 910302
GAE Dual Coupler/E-Bend, Mod. 910303
Three port circulator (Mfr. unknown) Mod. #284C1RC3A
GAE Dummy Load Coupler, Mod. # 910406
Dims: 12X14X17"H
No cables or manuals are included
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AGL C13170 microwave generator
1250W @ 2.45GHz
Peak V 4300
190/240VAC, single phase, 20A, 50/60Hz input power req.
Astex Mod. AX7610-4 Chemical Downstream
Plasma Source
Rev 1J, S/N 142
Used on Gasonics/Novellus PEP Iridia systems
UV lamp attached
tube installed (unsure if the tube is quartz, or sapphire)
Good condition, but we are unable to test this unit
Unit sold "as-is, where-is"
OEM data at: http://www.mksinst.com/docs/UR/ASTEXax7610DS.pdf
The AX7610 is a microwave plasma source for downstream chemical
etch applications, such as photoresist stripping and hard
mask removal. With replaceable quartz or sapphire tubes, the
AX7610 downstream source offers flexibility of configuration
to meet the most demanding application process parameters.
The quartz tube version is ideally suited for production of
atomic oxygen for resist stripping. The sapphire tube version
is compatible with much more severe CF4 and NF3 chemistries
for isotopic etch and other applications.
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Branson PM 112 generator
Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA |
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ENI ACG 5XL generator
ENI ACG-5XL, 500W @ 13.56MHz |
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ENI OEM 50 generator
1ea ENI Mod. OEM 50N-11601 RF Generator,
S/N 6256
50 Ohm output impedance
Type LC output connector
Amphenol Type D, 15 pin connector
Input 190-240, 330-415VAC/3PhY/50/60 Hz/30/15A
Output 5000W 13.56MHz
Weight 375 lbs
Dims 17 x 21 x 27"H
water cooled
set up for Novellus equipment |
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ENI OEM 12A generator
1ea ENI Mod. OEM 12AB RF Generator
used in Branson/IPC Mod. PM 332 RF Generator, P/N 13650-01
1000W @ 13.56MHz
220VAC/50/60Hz/1Ph/20A |
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ENI OEM 12B generator
1ea ENI Mod. OEM 12B, 1250W, 13.56 MHz, 200-240VAC, 50/60Hz,
3Ph, 20A, set up w/25 pin IO connector
(easily converted to 15 pin IO connection)
System rebuilt/tested operational w/30 day warranty |
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ENI Mod. OEM-25A or 25A XL
RF Generator:
2500W @ 13.56MHz
190-240VAC/3Ph/20A
Type HN output connector
Water cooled
Rebuilt/Tested/Operational |
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ENI match controller
Part No. MW-50-21181-50
Serial Number 148C, Rev B, (5/92) |
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AE MDX 5 DC P/S
5000W DC $2500 |
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AE LDM RF Generator
PEP 2500A Plasma Source |
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RFPP RF50 5KW generator
The RFPP power supply consist of a series of modules in an
aluminum chassis. Diagnostics can be read through the front
panel or through the RS-232/422/485
interface. Repair is accomplished by replacing the faulty
modules. RF power is developed by an amplifier of MOSFET design
mounted on an air-cooled heat
sink, water cooled for the larger supplies. The 50S with passive
front panel is air cooled. |
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RFPP AMN2001E match network
2000W @ 13.56MHz (remote or local control) (uses AMN-PS2 controller) |
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Gasonics/Novellus Microwave Downstream
Plasma Source Assembly, for PEP Iridia, with:
National Mod. NL 10250-17 magnetron tube
Astex GL212 power detector assembly (power detector)
Philips Mod. 2722 163 02101 circulator
Muegge Part Number MW2101A-26 waveguide/tuner assy
Astex Mod. AX7610-5 Downstream Plasma Source (Rev 1L)
Sapphire tube Mod. No. 94-3077 installed in plasma source
Dims: 36 x 12 x 15"H
AGL Microwave Power supply (11/98), Mod. No. D13765, Output
Freq. 2.45GHz, 0-1800W, 190-208VAC/1Ph/50/60Hz/25A, 0-10VDC
control signal, 19" rack mount
One Low Voltage cable is included |
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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