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CVC sputtering system

  
 

 
 


CVC sputtering system
CVC sputterer, 22" dia chamber, SS, Water cooled, CVC Gate Valve, CVC cold trap, CVC valving assy, 6" pregnant Diff. Pump.
4 stations (2 targets installed Ti/Al), semi/auto and manual operation. controls: Mech Pump, High Vac pump On/Off, DC Bias control, Target On/Off, System Gas (backfill)
Throttle control, Table rotation/speed control. 19" rack contains: CVC AVC485 valve controller, CVC GIC410 Ion Gauge controller, G-P 318 convectron guage controller,
AE MDX5 DC P/S 5KW, CVC K-4A DC P/S (spare)

 

  
 
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922

  
 

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CVC Mod CVE 301 EB-FR

CVC sputterer