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Gasonics Aura 3000 Process
chamber w/plasma source and power supply

  
 


 
 


Gasonics Aura 3000 Plasma Processing chamber, with:
- Plasma source
- Microwave Power Supply 
- associated cables

- Chamber is complete with door Assy, Baratron Head with isolation valve, pressure switch, leak check valve, set up for 8" wafers (can run 4- 8" wafers)
- Downstream Plasma Source Assembly PN 95-0483, with:
          National Electronics NL10254-15 microwave tube
          tunable waveguide
          Delnetics Inc. Filament Transformer AGL C12101E  RMS-0069, "filament on" digital timer
          Plasma Ignition lead
          Dims: 21x8x9.5"H
- AGL Mod. C12932-2 High Voltage Power Supply
          S/N 96213-099 (Date Code 96213)
          4300VDC Peak VDC, 1250W Max Output
          190-240VAC/1Ph/20A/50-60Hz

This was taken from a working machine, and is in fair condition

Actual shipping charges to be borne by purchaser. $230 packing charge.

More detailed pictures are available upon request.




  
 
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922