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Microwave Source, for Gasonics/Novellus Aura AE2001

  
 


 
 


Microwave Downstream Plasma Source Assembly, 
for Gasonics/Novellus tools, with:

  • HNL P/N A93-051-01, SN 13405
  • National magnetron tube
  • Plasma optical sensor
  • sapphire tube
  • Part Number A95-173-01, Rev 00 waveguide/tuner assy
  • Downstream Plasma Source with mounting flange PN L121595A-24 (A01-008-03 Rev B)
  • Dims: 22 x 12 x 11"H
  • No cables or manuals are included
  • This unit appears to be in good condition. It comes with a sapphire tube in the plasma source, and the cover over the magnetron HV junction box. We are unable to test it, so it is sold "as-is."

Packing charge: Domestic USA palletizing $85, Crating USA or International $225

Actual freight charges to be borne by purchaser. We recommend Fed Ex Freight (see http://www.fedex.com/us/freight/main/ ) or www.freightquote.com   

More detailed pictures are available upon request.




 
 
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164
Carson City,NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922