VERTEQ 1600-55M
Number of Units 1
Manufacturer Verteq
Model 1600-55M
Substrate Size 6
Wafer Size 150 mm
Controller Type Microprocessor Controller Type
Controller Model 1075227
Resistivity Monitor YES
Cart Mounted YES
SRD Configuration Double Stack
Accessories DTS-560M Resist Monitor.
Power Requirements 120 V 50/60 Hz 1 Phase
Condition Very Good
Exterior Dimensions
Width in cm
Depth in cm
Height in cm
