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Verteq 1600 SRD
VERTEQ 1600-34 double stack SRDs, Resistivity limit,
Auto Wash
Number of Units 3
Substrate Size 6"
Wafer Size 150 mm
Wafer Size Range
Set Size 150 mm
Heated Nitrogen YES
Rotors Included YES
Controller Type Analog Controller Type
Controller Model Verteq
Resistivity Monitor YES
Built-In Resistivity Monitor Included
Rinse Speeds 300 RPM
Dry Speeds 300 RPM
Timer Duration 180 sec
Cart Mounted YES
SRD Configuration Double Stack
Fl Delivery Channels
Number of Channels 2
DI Water YES
2 systems are complete, 1 system is partially cannibalized
Power Requirements 120 V 15.0 A 60 Hz
Condition Very Good
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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