| |
FSI Polaris 1000 Microlithography Cluster tool
, set up for 6", 1 Coat Module, 1 Develope Module,
1 Vapor Prime/Chill module, 1 Programmable proximity
precision back/chill module (4 back/1 chill each), 1
150mm I/O module, 1 Staubi 560C robot, 1 Ultratech 2700
Stepper Interface, 1 RAM 3000 cluster environmental
control system, 1 Electrical Power Distribution system,
1 remote cluster controller, 1 corner dispense module
with 3 cybor pumps w/integral millipore 16 stack filters,
1 corner dispense module with 3 cybor pumps w/o intergral
filters, 1 Optical Specialties Inc. optical inspection
station interface
|
|
