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Gasonics/Novellus Microwave Downstream Plasma
Source Assembly, for PEP

  
 

 
 

Gasonics/Novellus Microwave Downstream Plasma Source Assembly, for PEP Iridia, with:
National Mod. NL 10250-17 magnetron tube
Astex GL212 power detector assembly (power detector)
Philips Mod. 2722 163 02101 circulator
Muegge Part Number MW2101A-26 waveguide/tuner assy
Astex Mod. AX7610-5 Downstream Plasma Source (Rev 1L)
Sapphire tube Mod. No. 94-3077 installed in plasma source
Dims: 36 x 12 x 15"H
AGL Microwave Power supply (11/98), Mod. No. D13765, Output Freq. 2.45GHz, 0-1800W, 190-208VAC/1Ph/50/60Hz/25A, 0-10VDC control signal, 19" rack mount
One Low Voltage cable is included

  
 
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5225 Grumman Dr., Ste.
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