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ENI OEM 50 generator
1ea ENI Mod. OEM 50N-11601 RF Generator,
S/N 6256
50 Ohm output impedance
Type LC output connector
Amphenol Type D, 15 pin connector
Input 190-240, 330-415VAC/3PhY/50/60 Hz/30/15A
Output 5000W 13.56MHz
Weight 375 lbs
Dims 17 x 21 x 27"H
water cooled
set up for Novellus equipment
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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