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Astex Mod. AX7610-4 Chemical Downstream Plasma Source |
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Astex Mod. AX7610-4 Chemical Downstream
Plasma Source
Rev 1J, S/N 142
Used on Gasonics/Novellus PEP Iridia systems
UV lamp attached
tube installed (unsure if the tube is quartz, or sapphire)
Good condition, but we are unable to test this unit
Unit sold "as-is, where-is"
OEM data at: http://www.mksinst.com/docs/UR/ASTEXax7610DS.pdf
The AX7610 is a microwave plasma source for downstream
chemical etch applications, such as photoresist stripping
and hard mask removal. With replaceable quartz or sapphire
tubes, the AX7610 downstream source offers flexibility
of configuration to meet the most demanding application
process parameters. The quartz tube version is ideally
suited for production of atomic oxygen for resist stripping.
The sapphire tube version is compatible with much more
severe CF4 and NF3 chemistries for isotopic etch and
other applications.
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Plasmatek Labs,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
(775) 885 2900
Fax. (775) 885 2922
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