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Leybold Hereaus Mod. Z401S RIE/Plasma Etch system,
S/N 358-16-1038
, 13-5/8" dia x 14-5/8"D Stainless Steel chamber,
pneumatic load lock w/manual loading arm, 8.25"
substrate pallet, manually adjustable top electrode
for gap spacing, Up to 6ea gas inputs, Leybold Hereaus
Turbovac 450 turbo pump, Leybold Hereaus Mod. D40B mechanical
vacuum pump, MKS Throttle valve, ENI Mod. OEM-6 RF Generator,
solid state, water cooled, 600W @ 13.56MHz, Auto (PLC)/manual
logic, 1ea MKS Mod. PDR-C-1B Torrmeter Power Supply
Readout, 1ea MKS Mod. 252A Throttle Valve Controller,
1ea Leybold Mod. PM 310 Penning Vacuum Gauge, 1ea Leybold
Mod. TM 210S TC gauge, 4ea MKS Mod. PR-3000 Mass Flow
Gas Controllers, 1ea Xinix Mod. 1012 End Point Controller,
w/fibreoptic cable, 3ea Leybold Mod. BE05 manual controllers,
2ea Leybold Mod. DCA01 digital readout displays (Bias,
Fwd, and Ref. Power), 1ea Leybold Mod. NT 450 turbo
pump controller
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