March "Super Plasmod" 6x6" quartz chamber, 300W solid state RF Generator, automatch network. Single gas input.
Plasma Systems RF Power supplies matching networks Vacuum Systems, Pumps & Components Semiconductor Equipment Spare Parts Test & Facilities Equipments
Plasmatek Labs, 5225 Grumman Dr., Ste. #164, Carson City, NV 89706 USA Tel. (800) 770-7520, (775) 885 2900 Fax. (775) 885 2922
Branson/IPC Mod. L2101 Plasma Asher/Etcher Branson Mod. L2200 Plasma Stripper Branson Mod. L3200 Plasma Stripper Branson/IPC Mod. 2000 Plasma Asher/Etcher Branson/IPC Mod. 3000 Plasma Asher Branson/IPC Mod. 3000 Plasma Asher Branson/IPC Series 4000 Branson/IPC Series 4150 plasma asher/cleaner system Branson/IPC Series 4055 plasma asher/cleaner system Branson/IPC Mod. P3100 plasma asher/stripper system Branson/IPC Series 7150 Branson/IPC Series S3003 Branson/IPC Series S2100 Plasma Stripper system Branson/IPC Series S4100 Plasma Stripper system Branson/IPC Series S3100 Plasma Stripper system Davis and Wilder Mod. 425 Plasma Etch System Gasonics/IPC 9102 Ash/Etch system Gasonics Mod. A3010 Gasonics PEP 3510A/C Leybold Hereaus Mod. Z401S RIE March Plasmod Plasma ash/clean Tegal Mod. 411 Plasma Asher/Stripper system Tegal Mod. 415 plasma asher Tegal Mod. 421 plasma asher Tegal Mod. 701 Plasma Poly Etcher Tegal Mod. 803 Plasma Oxide Etch System
