| |
Branson/IPC Series S3100 Plasma Stripper system
* 1ea Branson/IPC Mod. S3100-11220 Reactor
Center, w/1ea 12(dia) x 20"(D) quartz chamber,
w/PM 702A 1000W automatch network, Dimensions: 28"Wx31"Dx20"H;
* 1ea Branson/IPC Mod. 3000C single channel controller,
one process gas input (5-10 psi), N2 purge (5-10 PSI)
0-99.9 minute digital timer, 0-1000W analog wattmeter,
analog vacuum guage, digital logic, pump valve requires
60-80 PSI CDA, dimensions: 18"Wx20"Dx10"H;
* 1ea Branson/IPC Mod. PM 112 or 132 RF Generator, 1000W
@ 13.56MHz, , 220VAC/50/60Hz/1Ph/40FLA (this provides
all necessary AC/DC voltages to the rest of the system),
dimensions: 23"W x 18"D x 13.5"H :
* fully automatic matching network
Features and Specifications
Model S3100
* Automatic, one channel, plasma barrel etcher with
oneprocess gas input.
Reactor Center (PM 11220)
* Quartz chamber (12 in. diameter X20 in. deep) with
hinged access door.
* 6 in. wafer compatible
* Optimum load: 50 wafers
* Cover safety interlocks
* Dimensions: 29 in. W X 31 in. D X 21 in. H, weight:
approx 75 pounds
Controller (3000 C)
* One program operation
* One gas flow rotameters 0-900 sccm (air)
* Switch-selectable step termination options
* Automatic/manual operation
* Analog wattmeter, forward/reflected scales
* Analog pressure display, 0-20 torr
* Digital elapsed timer, 0-99.9 min.
* ON/OFF vacuum, purge, gas and RF switches with indicator
lights
* START, CYCLE, and RESET pushbuttons
* Cover safety interlocks
* Color - coded wiring
* Dimensions: 25 in. W X 24 in. D X 10 in. H, weight:
approx 25 lbs
RF Generator (PM 112 or 132)
* 0-1000 watts @ 13.56 MHz, continuously variable, Dimensions:
23"W x 18"D x 13.5"H, Weight: approx
125 lbs.
Installation Requirements
* Dry control air, 60 - 80 psig
* Process gases, 15 psig nominal
* Electrical power: 200 - 250 VAC, 1%,40 Amps, 50/60
Hz
|
|
