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Branson/IPC Series S2100 Plasma Stripper system
1ea Branson/IPC Mod. S2100-11220 Reactor Center,
w/1ea 12"(dia) x 20"(D) quartz chamber, w/PM
702A 1000W automatch network, Dimensions: 28"Wx31"Dx20"H;
1ea Branson/IPC Mod. 2000C three channel controller,
w/three rotometer gas flow controllers, 0-900 SCCM,
0-99.9 minute digital timer, 0-1500W analog wattmeter,
digital vacuum guage, TTL digital logic, built in temp
controller for preheat in channel 1, Dimensions: 25"Wx20"Dx10"H
1ea Branson/IPC Mod PM 112, 1500W @ 13.56MHz, 208VAC/50/60Hz/1Ph/40FLA
Features and Specifications
Model S2100
* Automatic, three cycle, plasma barrel etcher with
temperature programmer and three process gas inputs.
Reactor Center (PM 11220)
* Quartz chamber (12 in. diameter X20 in. deep) with
hinged access door.
* 6 in. wafer compatible
* Optimum load: 50 wafers
* Temperature probe
* Cover safety interlocks
* Dimensions: 29 in. W X 31 in. D X 21 in. H
Controller (2000 C)
* Three program operation
* Three gas flow rotameters, 0-900 sccm (air)
* Switch-selectable step termination options
* Automatic/manual operation
* Analog wattmeter, forward/reflected scales
* Analog pressure display, 0-20 torr
* Digital temperature display (oC)
* Temperature programmer with thumbwheel setpoint
* Digital elapsed timer, 0-99.9 min.
* ON/OFF vacuum, purge, gas and RF switches with indicator
lights
* START, CYCLE, and RESET pushbuttons
* Cover safety interlocks
* Color - coded wiring
* Dimensions: 25 in. W X 24 in. D X 10 in. H
RF Generator (112)
• 0-1000 watts @ 13.56 MHz, continuously variable
• Air cooled tube type amplifier
• 200-240VAC/50/60Hz/1Ph/40 FLA
Installation Requirements
* Dry control air, 60 - 80 psig
* Process gases, 15 psig nominal
* Electrical power: 200 - 250 VAC, 1%,40 Amps, 50/60
Hz
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