• 1ea Branson/IPC Mod. P3100 plasma asher/stripper
system, consisting of:
• 1ea Branson/IPC Mod. P3075 Reactor Center, w/1ea
12" (dia) x 20" (D) quartz chamber, Mod. 732
1000W automatch network, EPD 2000 End of Process Detector;
• 1ea Branson/IPC Mod. 3000+ Controller, single
channel, two gas inputs, 0-99.9 minute digital timer
with display; (similar controller to 906U-4 controller,
for 4000 system)
• 1ea Branson/IPC Mod. PM 132 RF Generator, 1000W
@ 13.56 MHz, continuously variable;
• 1ea Branson/IPC Mod. Power Distribution Module;
• misc. Associated fittings/cables/manuals/60
day warranty.
• Installation requirements: Dry control air
60-80 psig, process gasses, 15 psig nominal, Electrical
power 190-250VAC/1Ph/40A/50/ 60Hz.
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