| |
Tegal Mod. 915 Plasma Asher/Stripper system
*Tegal 915 Batch photoresist stripper/backside etcher
*Power supply: RFPP Solid State RF, 500W@13.56 MHz
*Auto Impedance Matching
* input power 200/240V selectable, Single Phase, 50/60 Hz, 30A
* control: built in Tegal Computer, 8088, w/recipe storage. Mass flow gas inputs 2ea
|
|
