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Tegal Mod. 421 plasma asher
* 1ea Tegal Mod. 421 Plasma Etcher/Stripper system,
with:
* 1ea aluminum chamber, with 5"H x 9"W x 10"D
faraday cage/ electrode;
* Two channel auto/manual controller, w/preheat capability;
* Two heater rings at perimeter of chamber, and 4ea
rod heaters built into electrode;
* Two gas inputs;
* 300W RF Generator @ 13.56MHz;
* Manual Matching Network;
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