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Branson/IPC Series 4150 plasma asher/cleaner system
PM 4150-11630 reactor center, with 16" (dia) x
30" (D) aluminum chamber, Mod. PM 703 1500W automatch
network, Series 4000 gas panel, 2 gas inputs, built
in wattmeter and vacuum guage, auto/manual logic;
Mod. PM 906U-4 single channel digital controller, w/0-99.9
minute elapsed time display, auto/manual logic; Mod
PM 112 RF Generator, 1000W @ 13.56 MHz, 208-240VAC/1Ph/50
or 60Hz/40 FLA
W/faraday cage insert;
w/cables/manuals
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