Tegal Mod. 415 plasma asher
2-4" wafers, batch type stripper,
auto tuning,
auto/manual logic
1ea aluminum chamber, with 5"H x 10"W x 6"D
faraday cage/ electrode;
single channel auto/manual controller
w/preheat capability;
One heater ring around perimeter of chamber;
One gas input, with rotometer flow controller;
300W RF Generator @ 13.56MHz;
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