| |
Branson/IPC Series 4000, plasma asher/cleaner system,
with:
PM 11020 reactor center, with 1ea w/10" dia x 20"
(D) quartz chamber, Mod. PM 702 1000W automatch network,
(Series 4000 gas panel has 2 gas inputs w/rotometer
metering controls), built in wattmeter and vacuum guage,
Dim: 37"W x 33" D x 21" H, 150 lbs;
Mod. PM 906U-4 single channel digital controller, auto/manual
logic, 0-99.9 min elapsed time display, 13.5"W
x 16.5"D x 5"H, 20 lbs;
1ea Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA
|
|
