Branson/IPC Mod. 2000

 
 



 
 

Branson/IPC Mod. 2000

PM 11020 REACTOR CENTER

POWER RATING ......................1000 watts continuous input
REACTOR ..........................1ea 10" dia. x 20" long
OPERATING PRESSURE RANGE ..........0.1 - 10 torr
VACUUM SEALS ......................Silicone O rings and bell jar gasket
REACTOR WINDOW ....................Hinged and spring loaded, with latch for open position
PRESSURE TRANSDUCER ...............Thermocouple type
IMPEDANCE CONTROL .................Matches from 10-1000 watts to present input impedance of 50 ohms at RF power input connector. Automatic impedance matching once preset.

Controls
FLOW ............................. 3 - ON/OFF
FLOWMETERS........................ 3 - Range 0-900cc/min.
RF POWER CONTROL...................3 - ON/OFF
WATTMETER..........................0-1000W Forward, 0-300W Ref.
VACUUM METER........................0-20 Torr range


906U Operating Controls

PURGE GAS ........................ Switch
VACUUM ........................... Switch
MODE SWITCH ...................... Automatic or Manual control, switch selective
CYCLE............................. Push button to advance system logic to next state
START............................. Push button to activate automatic sequence
RESET ............................ Push button to purge chamber, reset auto sequence at end of cycle
TIMER ............................ 0-99.9 min digital timer

Mod. PM 119 RF Generator
500W @ 13.56MHz, 120VAC/1Ph/50/60Hz/15FLA


 
 
I MAKE THIS OFFER
Price Offered: $ 
Number Wanted:
Qualifications to Proposed Price and Number (if any)
Other Message
Full Name*    
Company
Main Phone*
Email*

* Required
 
 
 
PLEASE RESPOND PROMPTLY
Questions and Other Message:
Full Name*    
Company
Main Phone*
Email*

* Required
 
   
 
 

Product Lines

 
 


Plasma Systems

RF Power supplies
matching networks


Vacuum Systems,
Pumps & Components


Semiconductor Equipment

Spare Parts

Test & Facilities Equipments

 
 

Our Address

 
 


Plasmatek Labs
,
5225 Grumman Dr., Ste.
#164, Carson City, NV
89706 USA
Tel. (800) 770-7520,
       (775) 885 2900
Fax. (775) 885 2922

 
 

Plasma Lines

 
 

Branson/IPC Mod.
L2101 Plasma Asher/Etcher


Branson Mod.
L2200 Plasma Stripper


Branson Mod.
L3200 Plasma Stripper


Branson/IPC Mod.
2000 Plasma Asher/Etcher


Branson/IPC Mod.
3000 Plasma Asher


Branson/IPC Mod.
3000 Plasma Asher


Branson/IPC
Series 4000


Branson/IPC Series 4150 plasma asher/cleaner system

Branson/IPC Series 4055 plasma asher/cleaner system

Branson/IPC Mod. P3100 plasma asher/stripper system

Branson/IPC Series 7150

Branson/IPC Series S3003

Branson/IPC Series S2100 Plasma Stripper system

Branson/IPC Series S4100 Plasma Stripper system

Branson/IPC Series S3100 Plasma Stripper system

Davis and Wilder Mod. 425 Plasma Etch System

Gasonics/IPC 9102 Ash/Etch system

Gasonics Mod. A3010

Gasonics PEP 3510A/C

Leybold Hereaus Mod. Z401S RIE

March Plasmod Plasma ash/clean

Tegal Mod. 411 Plasma Asher/Stripper system

Tegal Mod. 415 plasma asher

Tegal Mod. 421 plasma asher

Tegal Mod. 701 Plasma Poly Etcher

Tegal Mod. 803 Plasma Oxide Etch System