Metroline/Tepla
Series 7104 Plasma Surface Treatment/Cleaning system,
with:
- Controller: Windows O/S based touch screen interface
offering fully automatic control. Multi-step recipes,
real time graphic display,
multi-level password access, data logging, and real
time SPC monitoring of all plasma parameters is provided.
- 7 shelf Electrode system, shelf dims 12.5"W
x 24.5"D (Optional: "cube" type electrode
11.625"W x 11.625"H x 24.25"D)
- RF Generator: ENI Mod. OEM 12B, 1000 watt 13.56 MHz
water cooled with automatic impedance matching network
- Process Pressure: Approx. 120 - 2000 mtorr
- All stainless steel plumbing.
- Display: Color 15" touch screen for control
and monitoring of process parameters, automatic recipes,
or manual plasma treatments.
- Four user specified gases, with 500 sccm Stainless
Steel MFCs come standard (user specified MFC size/ranges
are optional)
- Power Requirements: 208 - 240 volts, 3, 50/60 Hz
5 wire "wye".
Safety and Security
- Electronic and software interlocks
RF power
Pressure
Chamber door open/close
- Emergency OFF front and rear of reactor center and
on wall box.
- Password security for manual and edit modes.
- Audible alarms
- Software alarm limits on critical process parameters.
- Over-temperature alarm sensor (generator).
- Hard-wired RF relay interlocked with process chamber
door.
- External interlock connection to extend 24 VAC control
loop.
The 7100 Series is a low pressure RF plasma system
designed for general purpose cleaning and surface modification.
The 7100 offers:
* Precision cleaning
* Plasma deposited coatings
* Versatile fixturing configurations
* Reliable operation
* Bulkhead Mountable
* Color touch screen interface
* Easy maintenance
* Ideal for surface modification of:
- Medical devices
- Rigid and flex circuit processing
- Tissue culture media
- Potting of connectors and electronic devices
- And many other applications
This system presents impressive features and capabilities
with particular emphasis on reliability and safety.
The latest version incorporates new
performance and control improvements in conjunction
with proven production-worthy design features.
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