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Gasonics/IPC 9102 Ash/Etch system
1ea 12"(dia) x 20"(D) quartz barrel,
soft pumping and purge valving, low particulate design,
2ea mass flow gas inputs with VCR fittings, all SS plumbing,
multi channel/single board computer controlled, with
floppy storage, temperature controller, ENI OEM 12B
1250W RF Generator
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