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Gasonics Mod. A3010
single wafer downstream microwave asher/cleaner system,
1993 vintage, single wafer processing for 4-8"
wafers, approx 60 wafers per hour throughput (process
dependent), programmable microprocessor, Auto wafer
loader/unloader, set up with SMIF, Infrared heat source
for process temp. control, downstream plasma process:
no wafer radiation damage, soft-start vacuum system,
Quartz/Aluminum plasma chamber, Equipped with hard-wire
safety interlocks to prevent damage to the system or
injury to either the product or to personnel, Front
and backside resist removal, Automatic photo emission
type end-point detection, In-line cassette-to-cassette,
Visual alarm (flashing indicator) annunciates any illegal
operation or program error (2ea available)
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