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Branson/IPC Mod. L2200/2 single wafer downstream isotropic
etcher:
Reactor Center
* Dual ceramic/aluminum chambers for 100-200mm wafers, cassette
to casette operation (please note: we need your wafer tooling/boats,
to set up wafer robot)
* Automatic pneumatic soft-lift assemblies for each chamber
* In-line gas filters (Pall VM4 0.01 micron)
* Two PM 732 automatch networks
* Closed-loop, termperature controlled (preheating only w/resistance
heater), electrically-isolated wafer platen
* Process capabilities: resist descum, oxide etch, silicon cleanup,
sidewall polymer removal, polyimide strip, nitride pad etch
Process control and instrumentation
* Microprocessor controller (486 PC) with VGA video display
* Three step process, menu-driven programming with 27-recipe
storage
* Recipe/alarms editor
* Full-automatic, half-automatic, manual, and service operation
modes
* Hard/soft alarm system
* Automatic pressure control
* CRT system status display
* Programmable tolerance limit alarm
* Touch keyboard (light pen) for entry of process and system
parameters
* Three year battery backup RAM for program memory
Gas Handling Module and Control Features
* Four process gas lines and one purge line set up to customer
specs. * All Stainless steel valves and gas lines
* Automatic variable throttle valve for pressure control
* Soft vacuum and purge valving for minimum turbulence and
particle generation
* Separate capacitance manometers for each chamber with isolation
valve
* VCR fittings throughout for gas lines
Wafer Handling and Sensing
* Automatic pick-and-place wafer handling with Z axis capability
* Two stationary cassette stands for send-to-receive operation
DC Power Module
* Distributes 24V, +-15V and +5V power to controller
System Power Control Panel
* AC ON/OFF for system power, RF generator, and vacuum pumps
Power Cabinet Assembly
* Power Distribution Module
* Wafer Heater
* System power distribution
* Separate control for system power, RF generator, and vacuum
pumps control signal
* Shielded high-voltage components
* Emergency OFF switches
* Cover safety interlocks
* 24-VAC control to complete system
* ENI Mod.-12A RF Generator, 13.56MHz, crystal controlled,
0-1000 watts, continuously rated, Solid state, water-cooled
Safety and Security Features
* All covers interlocked
* Operator controls limited to Start, Stop;, and Emergency
OFF switches
* Electronic and software interlocks for RF power and gas
flow
* Emergency OFF switches (positioned on mainframe and power
cabinet)
Facility Requirements
* Compressed air: 80 to 100 psig (clean and dry)
* Electrical power: 220 to 240VAC, and 380VAC, 40 amp, 3 phase,
50/60 Hz
* Cooling water: 1.2 gal/min (house water, filtered) for RF
generator
* Dimensions: Weight
Reactor mainframe: 38"W x 36"D x 72-75"H (adjustable)
830 lbs
Power cabinet Assy: 24"W x 29"D x 30"H 180
lbs
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