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* 1ea Branson/IPC Mod. PM 11220 LP Reactor Center, w/1ea 12"
(dia) x 20" (D) quartz chamber, low particulate capability,
1ea Mod. PM 732 1000W automatch network, temperature probe,
Dimensions: 28"Wx31"Dx20"H;
* 1ea Branson/IPC Mod. 9110 controller, multistep/multirecipe
capability, up to 350 steps, CRT system status display, including
gas and vacuum valves, mass flow controller outputs, forward/reflected
power, chamber pressure/temperature, current recipe and step
status, and step terminator options (pressure, time, temperature,
or endpoint signal),
* 1ea Branson/IPC Mod. 9160 Gas Handling Module, w/5ea mass
flow controllers calibrated for: 2 SLPM N2, 2 SLPM O2, 200 SCCM
O2, 1 SLPM CF4, 200 SCCM CF4, Auto Solenoid Valves;
* 1ea Branson/IPC Mod. 332 RF Generator, solid state, 1000W
@ 13.56 MHz, 190-250VAC/1Ph/50/60Hz/40FLA, mounted in Power
Cabinet Assy, w/Power Distribution Module;
* Associated system cables/manuals/9" faraday cage
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